| Material | Real part of the refractive index, n |
Imaginary part of the refractive index, k | Minumum or maximum value of A1 (Degrees) | Repetition thickness, drep (nm) |
|---|---|---|---|---|
| Aluminum | 1.39 | 1.51 | 27.05 | 308.9 |
| Aluminum Oxide | 1.79 | 15.04 | 212.6 | |
| Aluminum Nitride | 2.11 | 8.81 | 167.5 | |
| Amorphous silicon | 4.23 | 0.461 | 13.50 | 76.7 |
| Cadmium Sulfide | 2.416 | 0.17 | 4.75 | 142.2 |
| Cadmium Telluride | 0.625 | 2.87 | 39.50 | |
| Carbon (non cubic) | 2.7 | 0.584 | 6.88 | 125.0 |
| Chrome ? | 3.465 | 1.163 | 13.27 | 94.9 |
| Copper | 2.43 | 3.46 | 30.25 | 141.2 |
| Diamond | 2.41 (@656.3nm) | 4.32 | 142.6 | |
| GaAs Native Oxide | 1.8 | 14.26 | 206.1 | |
| Gallium Antimonide | 5.145 | 1.1 | 19.40 | 62.5 |
| Gallium Arsenide | 3.856 | 0.196 | 10.53 | 84.6 |
| Gallium Nitride | 1.97 | 11.15 | 182.7 | |
| Gallium Phosphide | 3.31 | 5.87 | 99.7 | |
| Germanium | 5.441 | 0.785 | 19.91 | 59.0 |
| Glass | 1.5 | 20.64 | 270.6 | |
| Gold | 0.166 | 3.15 | 43.65 | |
| Hafnium Oxide | 1.9 | 12.40 | 191.6 | |
| Indium Antimonide | 4.313 | 1.823 | 19.38 | 75.2 |
| Indium Arsenide | 3.956 | 0.603 | 12.30 | 82.3 |
| Indium Nitride | 2.9 | 1.74 | 115.3 | |
| Indium Phosphide | 3.533 | 0.305 | 8.38 | 92.9 |
| Indium Tin Oxide | 1.8 | 14.26 | 206.1 | |
| Iridium | 2.53 | 4.6 | 34.13 | 134.7 |
| Lead Sulfide | 0.62 | 4.29 | ||
| Lead Floride | 1.391 | 23.33 | 308.5 | |
| Lithium Niobate | 2.283 | 2.2 | 23.79 | 152.1 |
| Molybdenum | 3.7 | 3.56 | 27.65 | 88.4 |
| Mylar | 1.65 | 17.29 | 233.3 | |
| Negative Resist | 1.52 | 20.17 | 264.8 | |
| Nickel | 1.08 | 3.74 | 38.05 | 594.4 |
| Osmium | 3.89 | 1.67 | 17.63 | 83.8 |
| Platinum | 2.33 | 4.16 | 33.36 | 148.4 |
| Polyimide | 1.6 | 18.36 | 244.3 | |
| Polysilicon | 4 | 0 to 0.5 | 11.41 | 81.4 |
| Pos Resist | 1.64 | 17.5 | 235.4 | |
| Pos Resist (E Beam) | 1.54 | 19.71 | 259.3 | |
| Potassium Chloride | 1.488 | 20.92 | 274.2 | |
| Rhodium | 2.18 | 5.65 | 37.68 | 160.8 |
| Sapphire | 1.766 | 14.92 | 211.6 | |
| Silicon | 3.875 | 0.018 | 10.88 | 84.2 |
| Silicon Carbide | 2.73 | 0.02 | 0.21 | 123.4 |
| Silicon Dioxide | 1.455 | 0 | 21.72 | 284.8 |
| Silicon Dioxide | 1.459 | 0 | 21.62 | 283.5 |
| Silicon monoxide | 1.969 | 0.01175 | 11.17 | 182.9 |
| Silicon Nitride | 2.02 | 10.29 | 176.9 | |
| Silver | 1.35 | 4 | 37.17 | 326.4 |
| Sodium Chloride | 1.543 | 19.64 | 258.5 | |
| Tantalum Pentoxide | 2.1 | 8.97 | 168.5 | |
| Titanium | 2.16 | 2.93 | 28.86 | 162.7 |
| Titanium Dioxide | 2.88 | 1.52 | 116.2 | |
| Tungsten | 3.65 | 2.92 | 24.66 | 89.7 |
| Zinc Sulfide | 2.354 | 5.11 | 146.6 |